Solar cells with silicon oxynitride dielectric layers and methods of forming silicon oxynitride dielectric layers for solar cell fabrication are described. For example, an emitter region of a solar cell includes a portion of a substrate having a back. . Preliminary results on PV cells and coated glass indicate the palpable benefits of the barriers in mitigating moisture intrusion and degradation of theunderlying structures using SiOxNy. Existing silicon oxynitride sputtering methods require high deposition temperatures or the use of hydrogen-containing precursors. . tions. . ABSTRACT: The ongoing reduction of wafer thickness and new solar cell concepts like selective emitters which make use of lowly doped emitters lead to the need for an improved front surface passivation of n-type emitters. Within this study a newly developed passivation stack system consisting of a. .
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